
High-purity gadolinium metal is melted in a vacuum induction melting furnace under vacuum or inert atmosphere. This prevents oxidation and impurity contamination, and the molten metal is cast into ingots.

The cast ingots are machined by lathe or saw to remove surface oxides and irregularities. This step ensures proper dimensions and prepares the ingot for further processing.

The ingots undergo forging or hot rolling to refine the grain structure, improve material uniformity, and gradually achieve dimensions closer to the final sputtering target size.

Vacuum annealing is applied to eliminate internal stresses generated during hot working. This stabilizes the microstructure and enhances machinability for subsequent steps.

Using CNC machining, the material is cut and shaped into the required form of the sputtering target, such as circular, rectangular, or customized designs.

Both the front and back surfaces of the target are precisely ground using surface grinders. This step ensures accurate thickness tolerance, flatness, and surface smoothness, which are critical for sputtering performance.

For improved thermal conductivity and mechanical strength, the gadolinium target can be bonded to copper or aluminum backing plates using indium bonding, elastomer bonding, or diffusion bonding techniques.