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High-purity dysprosium metal is melted in a vacuum induction melting furnace under a vacuum or inert gas atmosphere. This process prevents oxidation and contamination while ensuring uniform composition. The molten metal is then cast into ingots with controlled solidification conditions.
After casting, the ingots are kept at a specific temperature range below the melting point and cooled slowly under vacuum. This step refines the microstructure, forming a uniform hexagonal crystal phase and minimizing residual high-temperature cubic phase.
The cast ingots are machined or sawed to remove surface oxidation layers and irregularities. This ensures clean surfaces and accurate dimensions, preparing the material for subsequent hot working.
The shaped ingots are subjected to forging or hot rolling at controlled temperatures to achieve a dense, fine-grained structure. This process enhances mechanical strength, uniformity, and dimensional accuracy close to the final target size.
The hot-worked material is annealed in a high-vacuum furnace to relieve internal stresses generated during deformation. This step stabilizes the grain structure and improves machinability for precise final processing.
Using advanced CNC equipment, the annealed blanks are precisely machined into sputtering target shapes, such as circular, rectangular, or customized designs, meeting strict dimensional and tolerance requirements.
The target surfaces are finely ground and polished to achieve excellent flatness, smoothness, and uniform thickness. Final cleaning and inspection are conducted to ensure the product meets high purity and performance standards for sputtering applications.
