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High-purity erbium metal is melted and atomized into fine spherical powders, forming the base of target density and uniformity. The powders are then sieved to achieve optimal particle size distribution and thoroughly mixed to ensure consistent composition and homogeneity before compaction.
The prepared powder is compacted into a "green body" using a hydraulic press or cold isostatic pressing (CIP) equipment. This process forms a solid pre-sintered shape with sufficient mechanical strength for handling and further processing.
The green compact undergoes high-temperature sintering in a vacuum furnace. During this stage, the erbium particles bond together, porosity decreases, and the structure begins to densify, forming a strong and cohesive target body.
The sintered body is treated under high temperature and isostatic gas pressure to eliminate residual pores and enhance mechanical strength, density, and microstructural uniformity, resulting in a fully dense and stable target.
The densified target is precisely machined by CNC equipment into the required dimensions and shapes. Both sides are then finely ground and polished to achieve excellent flatness and surface finish, meeting sputtering equipment standards.
To remove residual stress caused by sintering and machining, the target is annealed in a vacuum environment. This step stabilizes the crystal structure and ensures consistent performance during sputtering operations.
Each erbium sputtering target undergoes strict quality testing, including density measurement, purity analysis, and surface inspection. Only products that fully meet technical and quality standards are carefully packaged for shipment.
