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High-purity scandium metal is melted in a vacuum induction furnace under vacuum or inert atmosphere. This prevents oxidation and contamination. The molten metal is then cast into ingots with controlled composition and purity.
The cast ingots are machined using lathes or saws to remove surface oxidation and irregularities. This step ensures clean surfaces and prepares the ingots with proper dimensions for further processing.
Through forging or hot rolling, the ingots undergo thermal deformation. This process refines the grain structure, improves material density, and brings the ingot closer to the desired sputtering target dimensions.
Vacuum annealing is performed to release internal stresses generated during hot working. It stabilizes the microstructure, enhances mechanical properties, and improves further machinability.
The annealed material is machined using CNC equipment to achieve the required shapes and dimensions, such as circular, rectangular, or customized designs for specific sputtering systems.
Both the front and back surfaces of the scandium target are finely ground using precision grinding machines. This ensures strict thickness tolerance, smoothness, and flatness to meet sputtering quality standards.
Each scandium sputtering target undergoes thorough inspection for purity, density, dimensions, and surface quality. After passing quality checks, the products are securely packaged in clean conditions to prevent contamination during transport.
