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High-purity yttrium metal (up to 99.995%) is melted using vacuum induction melting (VIM) or electron beam melting (EBM) to eliminate impurities and achieve a uniform, dense structure. Each batch is tested using GDMS, ICP-MS, and ONH analysis to confirm purity and ensure ultra-low levels of trace contaminants before further processing.
The pre-formed yttrium blocks are hot-forged or hot-rolled to increase density, eliminate internal voids, and refine the grain structure. This enhances mechanical stability and improves the uniform erosion behavior of the final target during sputtering.
The forged blanks are then CNC-machined to the specified size, shape, and flatness required by the customer. This includes tight tolerances on diameter, thickness, and parallelism to ensure compatibility with magnetron sputtering systems.
Each yttrium target undergoes surface polishing and cleaning to remove oxidation and minimize surface roughness (typically below 2 µm). This provides a clean, smooth surface that helps ensure even film formation and high sputtering efficiency.
When needed, yttrium targets are bonded to copper or molybdenum backing plates using indium soldering or diffusion bonding, which improves thermal conductivity and mechanical stability in high-power sputtering systems.
All finished targets are inspected for purity, density, grain structure, surface quality, and dimensional accuracy. Approved products are vacuum-sealed with desiccant or argon-filled and packaged in protective cartons. Each shipment includes a Certificate of Analysis (COA) and full quality documentation for traceability.
